PUBLICATIONS & PAPERS

David Sheriff. "HBr Flow Control Considerations," a paper delivered at the Lam Research Corporation 1991 Processing Perspective Seminar, May 22, 1991.

David Sheriff. "Mass Flow Controller Features Digital Calibration," Solid State Technology, (February 1993), pages 33-35.

David Sheriff. "Limits to Growth and Making the Most of Them," The Executive Summary Report, a quarterly publication of the SEMI Market Statistics Program, Semiconductor Equipment and Materials International, (First quarter 1995), pages 4-5.

David Sheriff. "Diagnostic Procedures Facilitate the Solving of Gas Flow Problems," Solid State Technology, (August 1995), pages 63-69. [Cover article]

David Sheriff. "How to Optimize MFC Performance," Semiconductor Fabtech, (3rd edition, 1995), pages 140-147.

David Sheriff. "What Really Creates Standards?" Solid State Technology, (February 1996), pages 135-136.

Stephen M. Fine, David P. Sheriff and others. Optimizing the UHP Gas Distribution System For a Plasma Etch Tool," Solid State Technology, (March 1996), pages 71-81.

David Sheriff and Bruce Phillips. "Benefits of Minimalist Gas System Design," Solid State Technology, (October 1966), pages 151-155.

David Sheriff and Dan LeMay. "A Users Guide to Accurate Gas Flow Calibration," Solid State Technology, (November 1996), pages 83-96.

David Sheriff and John Lamirande. "Consistent +/- 3 Sigma Calibration for Mass Flow Controllers," Semiconductor International, (March 1997), pages 93-99.

David Sheriff. "Manifold Destiny: Gas Systems Go Modular," Solid State Technology, (October 1997)

 

The links used to work but many publications have rearranged their websites so I expect the material has gone missing or is referenced another way.

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